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QAM-4 研发溅射系统

小型溅射系统,适合研发使用

QAM-4是一款小型研发用溅射系统,支持4片基片。配备多个靶位,可沉积多种材料。真空系统快速抽气,适合快速工艺开发。

应用领域:

薄膜材料研发、工艺开发、小批量制备

核心特点

  • 4片基片容量
  • 多靶位配置
  • 快速抽气系统
  • 适合研发使用
  • 工艺灵活可调
  • 性价比高
产品信息
  • 品牌 ULVAC
  • 型号 QAM-4
  • 类别 薄膜制备
  • 领域 研发设备、薄膜制备

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