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SME-200 PZT溅射系统

Home > Projects > SME-...

PZT压电薄膜溅射系统

SME-200是专门用于PZT压电薄膜沉积的溅射系统。采用射频磁控溅射技术，可获得高质量的PZT薄膜。适用于铁电存储器、MEMS器件等应用。

应用领域：

PZT器件制造、铁电存储器、MEMS传感器

核心特点

  • 专门针对PZT薄膜优化
  • 射频磁控溅射
  • 高质量薄膜沉积
  • 优异的压电性能
  • 工艺稳定可靠
  • 适合量产应用
产品信息
  • 品牌 ULVAC
  • 型号 SME-200
  • 类别 薄膜制备
  • 领域 PZT器件、MEMS

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