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THERMCO 8000 水平炉管系统

Home > Projects > THER...

水平炉管系统，高温退火与氧化

THERMCO 8000水平炉管系统提供高温退火、氧化、扩散等工艺。支持多个工艺管，可批量处理晶圆。温度控制精度高，均匀性优异。

应用领域：

氧化、退火、扩散、薄膜沉积

核心特点

  • 高温工艺能力
  • 多管配置
  • 批量处理
  • 高精度温控
  • 优异的均匀性
  • 工艺稳定可靠
产品信息
  • 品牌 ULVAC
  • 型号 THERMCO 8000
  • 类别 高温工艺
  • 领域 半导体制造、热处理

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